Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO2

Lionel C. Gontard, Joerg R. Jinschek, Haiyan Ou, Jo Verbeeck and Rafal E. Dunin-Borkowski

Applied Physics Letters, Volume 100, Issue 26, June 2012

Investigation of the Growth Mechanisms of a-CHx Coatings Deposited by Pulsed Reactive Magnetron Sputtering

C. Lopez-Santos, J. L. Colaux, J. C. Gonzalez, and S. Lucas

The Journal of Physical ChemistryC, 116 (22), pp 12017 - 12026, May 2012

Magnetron sputtered a-SiOxNy thin films: A closed porous nanostructure with controlled optical and mechanical properties

V. Godinho, T.C. Rojas, A. Fernández

Microporous and Mesoporous Materials, Volume 149, Issue 1, 1 February 2012, Pages 142–146